Integration of P-CuO Thin Sputtered Layers onto Microsensor Platforms for Gas Sensing
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چکیده
منابع مشابه
Integration of P-CuO Thin Sputtered Layers onto Microsensor Platforms for Gas Sensing
P-type semiconducting copper oxide (CuO) thin films deposited by radio-frequency (RF) sputtering were integrated onto microsensors using classical photolithography technologies. The integration of the 50-nm-thick layer could be successfully carried out using the lift-off process. The microsensors were tested with variable thermal sequences under carbon monoxide (CO), ammonia (NH₃), acetaldehyde...
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H2S gas sensing response characteristics of bare SnO2 thin films and heterostuctures with nanolayer (10 nm) of Cu and CuO are studied. Changes in resistance values, occurring with integration of Cu and CuO nanolayers on SnO2 is acquired real-time, and compared. Rise in sensor resistance after introduction of Cu and CuO nanolayers on SnO2 sensing layer is understood to enhance the sensing respon...
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ژورنال
عنوان ژورنال: Sensors
سال: 2017
ISSN: 1424-8220
DOI: 10.3390/s17061409